The dry etching hardware design basically involves a vacuum chamber, special gas delivery system, radio frequency (RF) waveform generator to supply power to the plasma, heated chuck to seat the wafer, and an exhaust system.
According to the new market research report “Global Dry Etching Equipment Market Report 2023-2029”, published by QYResearch, the global Dry Etching Equipment market size is projected to reach USD 29.58 billion by 2029, at a CAGR of 7.3% during the forecast period.
Figure. Global Dry Etching Equipment Market Size (US$ Million), 2018-2029
Figure. Global Dry Etching Equipment Top 11 Players Ranking and Market Share（Based on data of 2021, Continually updated）
The global key manufacturers of Dry Etching Equipment include Lam Research, Tokyo Electron Limited, Applied Materials, Hitachi High-Tech, SEMES, AMEC, NAURA, SPTS Technologies (KLA), Oxford Instruments, Plasma-Therm, etc. In 2021, the global top five players had a share approximately 95.0% in terms of revenue.
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