IntroductionIn
recent years, semiconductor manufacturing factories have rapidly become smart fabs, making factory automation semiconductors and real-time equipment data management indispensable.However, many old-style (legacy) semiconductor equipment is still in operation at actual sites, and there is a problem that it cannot be directly connected to the latest host systems or MES.
A typical solution to this problem is the implementation of the SECS/GEM protocol.
By properly implementing SECS/GEM for legacy equipment, you can acquire operational status, alarms, recipes, and process data even from older equipment, achieving modern semiconductor equipment integration. This article provides detailed explanations of practical steps and technical points for successfully implementing SECS/GEM on older tools.
Challenges facing legacy semiconductor equipment
Many older equipment is generally not SECS/GEM compliant or only partially SECS-II compliant, which creates the following challenges for Equipment Connectivity Semiconductor Fabs:
- Equipment operation status depends on manual input
- Real-time acquisition of alarms and events is not possible
- Lack of collaboration with MES and Factory Host
- Difficult to visualize and analyze the process
Adding an interface compliant with SEMI SECS GEM standards (SEMI E4 / E5 / E30) can significantly improve these issues.
1. Current Status Assessment and Signal Survey:
Before starting SECS/GEM protocol implementation, determine the signals the equipment can provide (PLC, I/O, RS-232, Ethernet, etc.).
In many cases, data can be acquired via a PLC or controller. This is the first step in legacy equipment automation.
2. SECS/GEM Controller Installation:
Next, install an external GEM controller and SECS/GEM software. This enables connection to the host via SECS II GEM communication.
This is the standard method for implementing SECS/GEM on older tools.
3. Data Mapping and Event Definition:
Map equipment data to SECS/GEM Status Variables (SVs), ECVs, events, and alarms. This enables tool automation using SECS/GEM, allowing the equipment to be controlled and monitored from the host.
SECS/GEM for legacy equipment is the integrated management of the entire fab.
After implementing SECS/GEM, your equipment will communicate with the MES and Factory Host in real time, enabling you to:
- Improve OEE
- Reduced downtime
- Automated Recipe Management
- Alarm analysis and predictive maintenance
This strengthens factory automation semiconductor and fully realizes semiconductor equipment integration.
SECS GEM integrated semiconductor equipment is particularly effective in fab environments where new and old equipment coexists.
The following points are important for a successful SECS/GEM retrofit for legacy tools:
Full compliance with SEMI SECS GEM standards
Compatibility with equipment manufacturer specifications and on-site operation
Design with future expandability in mind
Stable HSMS/SECS II GEM communication A
well-designed SECS GEM protocol implementation goes beyond simply adding communications; it fundamentally enhances the value of the equipment.
Implementing SECS/GEM on older tools is the optimal way to achieve equipment connectivity for semiconductor fabs and advanced automation while minimizing new capital investment.
SECS/GEM retrofit for legacy tools enables factory-wide visibility, efficiency, and quality improvement, and also lays the groundwork for future AI, predictive maintenance, and data analysis.
Now is the time to consider SECS/GEM integration of semiconductor equipment to transform legacy equipment into a valuable asset rather than a constraint.