Ring Silicon
Made by single or multi-crystalline silicon ingot materials. The outside diameter is up to 650mm. The ring product is used in the dry etching machine as the focus ring, outer electrode, confinement ring.
Features of DSTC Silicon Ring
1
Establishment of plasma etching condition.
2
Use as electrodes for RF units.
3
Control sidewall damage of the reactive substance, improve etching aspect ratios and optimize etching surfaces.
4
Improve the uniformity and yield of the edge of silicon wafer.
Specifications of DSTC Silicon Ring
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Outer Diameter |
Within 650mm |
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Crystal Orientation |
Customized |
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Conductive Type/Doping: |
Custom |
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Resistivity |
Low Resistance (E.G.<0.015,<0.02...). ; |
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Moderate Resistance (E.G.1-4); |
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High Resistance (E.G. 60-90); |
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Customer Customization |
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Thickness |
Customized |
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Other Specifications |
Customized |
Silicon Ring Gallery
The Silicon Ring is used in the dry etching machine as the outside electrode or the lower electrode.
If you want to know more about capture ring, confinement ring, semiconductor ring, bottom ring, edge ring and c section ring, please visit our website.
As a silicon semiconductor manufacturing company, we will do our best to meet all the needs of customers.
