Silicon Pedestal
The Silicon Pedestal is a pure silicone base product designed to ensure temperature stability in the thermal reaction tube during silicon wafer processing, thereby enhancing insulation efficiency. Silicon wafer processing is an extremely precise procedure where temperature plays a crucial role, directly impacting the thickness and uniformity of the silicon wafer film.
Positioned at the lower section of the furnace's thermal reaction tube, the Silicon Pedestal supports the silicon chip carrier while providing effective heat insulation. At the conclusion of the process, it gradually cools down to ambient temperature along with the silicon wafer carrier.
Features of DSTC Silicon Pedestal
1
High-purity silicon material can be customized for structural design.
2
It is also not easy to cause deformation, reusable, longevous.
Specifications of DSTC Silicon Pedestal
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Product Structure |
Integrated, Welding |
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Conductive Type/Doping |
Custom |
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Resistivity |
Low Resistance (E.G.<0.015,<0.02...). ; |
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Moderate Resistance (E.G.1-4); |
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High Resistance (E.G. 60-90); |
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Customer Customization |
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Material Type |
Polycrystal/Single Crystal |
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Crystal Orientation |
Customized |
Silicon Pedestal Gallery
It is utilized to stabilize the treatment environment of the crystal boat within the high-temperature furnace chamber, ensuring temperature stability in the thermal reaction tube and enhancing insulation efficiency.
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